SPV-200 Vacuum plasma cleaning machine

  • Description
  • Inquiry

SPV-200    Vacuum plasma cleaning machine

Outline:

Vacuum Plasma Cleaner(Plasma cleaner),the gas is separated into plasma state through the excitation power supply, and the plasma ACTS on the product surface to clean the pollutants on the product surface, so as to improve the surface activity and enhance the adhesion.Plasma cleaning is a new, environmental protection, efficient and stable surface treatment.

 

SPV-200    Vacuum plasma cleaning machine

Product feature:

1.Product placement fixture flexible, can adapt to irregular products

2.Horizontal electrode design can meet the requirements of soft product processing.

3.Low energy and gas consumption products.

4.Convenient way to put up and down the board

5.Vacuum system integration, small footprint

6.Reasonable plasma reaction space, so that the treatment is more uniform

7.Integrated control system design makes operation more convenient

 

 

 SPV-200    Vacuum plasma cleaning machine

Industry application:

1.Mobile phone industry: TP, middle frame, back cover surface cleaning activation

2.PCB/FPC industry: hole drilling and surface cleaning, Coverlay surface coarsening and cleaning

3.Semiconductor industry: semiconductor packaging, camera module, LED packaging, BGA packaging, 4.Wire Bond pretreatment

5.Ceramics: packaging, pre-treatment of glue

6.Surface roughening etching: PI surface roughening, PPS etching, semiconductor silicon chip PN junction removal, ITO film etching

7.Plastic materials: Teflon surface activation, ABS surface activation, and other plastic material cleaning activation

8.Clean the surface before applying ITO

 

SPV-200    Vacuum plasma cleaning machine

Specification of equipment:

 

Power systemradio-frequency power supplymedium-frequency power supply
power0~1000W0~2000W
frequency13.56MHz40KHz
vacuum system· multi cell pump

 

Roots pump + single stage rotary vane pump
vacuum lineAll stainless steel piping, and high strength vacuum bellows
· Material

 

Aluminum alloy (customizable stainless steel chamber)
thickness25mm
leakproofnessMilitary grade welding seal
Cavity internal dimensions600×600×600mm(W×H×D)
Effective size of electrode plate575×510mm(W×D)
Available space spacing34mm
Electrode plate layoutHorizontal layout, movable extraction
Work trayStandard set, material optional (aluminum, wire mesh)
work space8 layer
Gas systemflow range0~300SCCM
Process gas gas circuitStandard two channels, can be customized (argon, oxygen, nitrogen, hydrogen, carbon tetrafluoride)
control systemsystems controlPLC
delivery method7 inch touch screen
·  Other Parameter

 

boundary dimension1050×1750×1050mm(宽×高×深)
weight350KG
Device Appearance Colorsilver gray

 

 

Factory specifications:

Factory specifications
 

Ac power specification

 

 

Power supply:AC380V,50/60Hz,5wire,50A

 

Factory exhaust

 

Flow:2.0 m³/min
 

Gas requirements for plant work

 

 

Flow:1~10 L/min

Pressure:3~7 kg/cm²

Pipe diameter:6×4 mm

Texture:PU pipe

Purity:More than 99.99%

 

Factory compressed air requirements

 

 

Flow:1~10 L/min

Pressure:3~7 kg/cm²

Pipe diameter:8×5 mm

Texture:PU pipe

Dew point:-40℃ under

Particle>0.3μm:10Pcs/ft³

 

 

2.3 General  Requirements

General requirements
Risk identificationHigh pressure hazard identification

 

 

Service environmenttemperature:15~30℃

humidity:30~70%

Other matters needing attentionNo combustible gases, corrosive gases, explosions or reactive dust

Gas cylinders need to be fixed

 

 

                             Configuration list
Serial NumberNamedescriptionunitquantity
1Main engineboundary dimension:1050×1750×1050mm

(width × height × depth)

 

Pc

1
2 

Love sincerely

 

Aluminum alloy vacuum chamber

 

inside dimension 450×450×500mm

(width × height × depth)

 

Pc

1
3Excitation power supply 

radio-frequency power supply

edium-frequency power supplySet1
 

frequency:13.56MHz;

Power: 0~1000W

Equipped with automatic vacuum capacitor matching machine

 

frequency:40KHz;

0~2000W;

 

4PLCSiemens,S7-200 

Pc

1
5 

Touch screen

Wei lun tong,7 inch screen,MT6071iE 

Pc

1
6Flowmeter· British wawick brand,Argon,Oxygen

 

Pc2
7Vacuum pumpRoots pump (BSJ70) -251 m3/h + single stage rotary vane pump (Laipo SV100B-100m3/h)Pc1
8 

Vacuum gauge

· INFICON

 

 

Pc

1
9SpecificationVacuum plasma cleaning machine spv-200 operation manual 

Pc

1

 

 

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