SPV-100 Vacuum plasma cleaning machine

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SPV-100    Vacuum plasma cleaning machine

Outline:

Vacuum Plasma Cleaner(Plasma cleaner),the gas is separated into plasma state through the excitation power supply, and the plasma ACTS on the product surface to clean the pollutants on the product surface, so as to improve the surface activity and enhance the adhesion.Plasma cleaning is a new, environmental protection, efficient and stable surface treatment.

 

SPV-100    Vacuum plasma cleaning machine

Product feature:

1.Product placement fixture flexible, can adapt to irregular products

2.Horizontal electrode design can meet the requirements of soft product processing.

3.Low energy and gas consumption products.

4.Convenient way to put up and down the board

5.Vacuum system integration, small footprint

6.Reasonable plasma reaction space, so that the treatment is more uniform

7.Integrated control system design makes operation more convenient

 

 

 SPV-100    Vacuum plasma cleaning machine

Industry application:

1.Mobile phone industry: TP, middle frame, back cover surface cleaning activation

2.PCB/FPC industry: hole drilling and surface cleaning, Coverlay surface coarsening and cleaning

3.Semiconductor industry: semiconductor packaging, camera module, LED packaging, BGA packaging, 4.Wire Bond pretreatment

5.Ceramics: packaging, pre-treatment of glue

6.Surface roughening etching: PI surface roughening, PPS etching, semiconductor silicon chip PN junction removal, ITO film etching

7.Plastic materials: Teflon surface activation, ABS surface activation, and other plastic material cleaning activation

8.Clean the surface before applying ITO

 

SPV-100    Vacuum plasma cleaning machine

Specification of equipment:

Power system 

radio-frequency power supply

medium-frequency power supply
power0~600W0~2000W
frequency13.56MHz40KHz
 

 

 

 

 

 

 

 

 

 

 

 

 

Vacuum plant

 

Double-stage vane pump (oil pump)

 

 

 

 

60m3/h

 

vacuum line

All stainless steel piping and high strength vacuum bellows
textureAluminum alloy (customizable stainless steel cavity)
thickness25mm
leakproofnessMilitary grade welding seal
Cavity internal dimensions4450×450×500mm

(width × height × depth)

 

Effective size of electrode plate

420×411mm(width × depth)
Available space spacing22.5mm
 

Electrode layout

 

 

 

Horizontal arrangement, activity extraction

 

 

Work trayStandard one set, material optional (aluminum, steel wire mesh)
 

work space

8 layer
Gas systemflow range0~300SCCM
Process gas pathStandard with two, can be customized
Control systemsystems controlPLC
delivery method7 inch touch screen
Other parametersboundary dimension900×1750×1000mm(w×h×d)
weight200KG
Equipment appearance colorsilver gray

 

 

 

Factory specifications:

Factory specifications
 

Ac power specification

 

 

Power supply:AC380V,50/60Hz,5wire,50A

 

Factory exhaust

 

Flow:2.0 m³/min
 

Gas requirements for plant work

 

 

Flow:1~10 L/min

Pressure:3~7 kg/cm²

Pipe diameter:6×4 mm

Texture:PU pipe

Purity:More than 99.99%

 

Factory compressed air requirements

 

 

Flow:1~10 L/min

Pressure:3~7 kg/cm²

Pipe diameter:8×5 mm

Texture:PUpipe

Dew point:-40℃ under

Particle>0.3μm:10Pcs/ft³

 

 

 

 

 

 

 

 

 

 

 

2.3 General  Requirements

General requirements
Risk identificationHigh pressure hazard identification

 

 

Service environmenttemperature:15~30℃

humidity:30~70%

Other matters needing attentionNo combustible gases, corrosive gases, explosions or reactive dust

Gas cylinders need to be fixed

 

                             Configuration list
Serial NumberNamedescriptionunitquantity
1Main engineboundary dimension:900×1750×1000mm

(width × height × depth)

Pc1
2 

Love sincerely

 

Aluminum alloy vacuum chamber

 

inside dimension 450×450×500mm

(width × height × depth)

 

Pc

1
3Excitation power supply 

radio-frequency power supply

edium-frequency power supplySet1
 

frequency:13.56MHz;

Power 0 ~ 600 w

Or 0~1000W is optional;

Fully automatic vacuum capacitor matching unit

 

frequency:40KHz;

0~1000W;

 

4PLCSiemens,S7-200 

Pc

1
5 

Touch screen

Wei lun tong,7 inch screen,MT6071iE 

Pc

1
6FlowmeterBritish wawick brandPc2
7Vacuum pumpFlyover double-stage vane pump (oil pump):60m3/h 

Pc

1
8 

Vacuum gauge

The fu kang 

Pc

1
9SpecificationVacuum plasma cleaning machine spv-100 operation manual 

Pc

1

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