SPV-60 Vacuum plasma cleaning machine

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SPV-60 Vacuum plasma cleaning machine

Overzicht:

Vacuum Plasma Cleaner(Plasma-reiniger),the gas is separated into plasma state through the excitation power supply, and the plasma ACTS on the product surface to clean the pollutants on the product surface, so as to improve the surface activity and enhance the adhesion.Plasma cleaning is a new, milieubescherming, efficient and stable surface treatment.

SPV-60 Vacuum plasma cleaning machine

P.roduct feature:

1.Product placement fixture flexible, can adapt to irregular products

2.Horizontal electrode design can meet the requirements of soft product processing.

3.Low energy and gas consumption products.

4.Convenient way to put up and down the board

5.Vacuum system integration, small footprint

6.Reasonable plasma reaction space, so that the treatment is more uniform

7.Integrated control system design makes operation more convenient

 

SPV-60 Vacuum plasma cleaning machine

ikndustry application:

1.Mobile phone industry: TP, middle frame, back cover surface cleaning activation

2.PCB/FPC industry: hole drilling and surface cleaning, Coverlay surface coarsening and cleaning

3.Semiconductor industry: semiconductor packaging, cameramodule, LED packaging, BGA packaging, 4.Wire Bond pretreatment

5.Ceramics: verpakking, pre-treatment of glue

6.Surface roughening etching: PI surface roughening, PPS etching, semiconductor silicon chip PN junction removal, ITO film etching

7.Plastic materials: Teflon surface activation, ABS surface activation, and other plastic material cleaning activation

8.Clean the surface before applying ITO

 

SPV-60 Vacuum plasma cleaning machine

Technical specifications

 

Power System

 

Radio-frequency power supplyMedium-frequency power supply
Kracht0~600W0~1000W
Frequentie13.56MHz40KHz
Vacuum system

 

Two-stage rotary vane pump (oil pump)40m3/h
Vacuum lineAll stainless steel piping, and high strength vacuum bellows
MateriaalAluminum alloy (customizable stainless steel chamber)
Dikte25mm
LeakproofnessMilitary grade welding seal
Internal dimension of cavity375×375×430mm(W×H×D)
Effective size of electrode plate345×344mm(W×D)
Available space spacing22.5mm
Electrode plate layoutHorizontal layout, movable extraction
Work trayStandard set, material optional (aluminium, wire mesh)
Work space6 layers
Gas system

 

Flow range0~300SCCM
Process gas gas circuitStandard with two channels, can be customized
Controle systeemSystem controlPLC
Delivery method7 inch touchscreen
Other Parameter

 

Boundary dimension900×1600×900mm(宽×高×深)
Gewicht150KG
Device appearance colorsilver gray


Factory specification requirements

Factory specification requirements
Ac power specificationsStroomvoorziening:AC380V,50/60Hz,5 VMS-2010F VMS-3020F VMS-4030F VMS-5040F Beeldmeetmachine,50EEN
FabrieksuitlaatStroom:2.0 m³/min
Gas requirements for factory workStroom:1~10 L/min

Druk:3~7 kg/cm²

Pijp diameter:6×4 mm

Materiaal: PU-buis

Purity: above 99.99%

Fabrieksvereisten voor persluchtStroom:1~10 L/min

Druk:3~7 kg/cm²

Pijp diameter:8×5 mm

Materiaal: PU-buis

Dew point: below -40℃

Particle>0.3μm:10Pcs/ft³


Configuration list

configuration list
NeeNaamOmschrijvingEenheidAantal
1GastheerBoundary dimension:900×1600×900mm(W×H×D)Pc1
2 Vacuum chamberAluminum alloy vacuum chamber

Inside dimension375×375×430mm(W×H×D)

Pc1
3Excitation power supplyRadio-frequency power supplyMedium-frequency power supplySet1
Frequentie:13.56MHz

Kracht :0~600W

Automatic vacuum capacitor matcher

Frequentie:40KHz;

0~1000W;

 

4PLCSIEMENSS7-200Pc1
5Touch screenVellon, 7 inch screen, MT6071iEPc1
6FlowmeterBritish Wawick brandPc2
7Vacuum pompFlyover two-stage rotary vane pump (oil pump) : 40m3/hPc1
8Vacuum gaugeINFICON

 

Pc1
9Handleiding

 

Operation manual of vacuum plasma cleaner SPV-60Pc1

 

Optional table

Optional table
Excitation power supplyRadio-frequency power supplyMedium-frequency power supply
Custom power: frequency:13.56MHz

Kracht:0~1000W

Custom automatic vacuum capacitor matching machine

Frequentie:40KHz,stroom:2000W.

 

CERES power supply: frequency 13.56MHz

Kracht:0~600W or 0~1000W Optional

American CERES automatic vacuum capacitor matcher

Vacuum pompGermany Leibao double-stage rotary vane pump (oil pump):40m3/h
Flyover two-stage rotary vane pump (oil pump) :40m3/h

 

 

 

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