SPV-200 Vacuum plasma cleaning machine

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SPV-200 Vacuum plasma cleaning machine

Overzicht:

Vacuum Plasma Cleaner(Plasma-reiniger),the gas is separated into plasma state through the excitation power supply, and the plasma ACTS on the product surface to clean the pollutants on the product surface, so as to improve the surface activity and enhance the adhesion.Plasma cleaning is a new, milieubescherming, efficient and stable surface treatment.

 

SPV-200 Vacuum plasma cleaning machine

P.roduct feature:

1.Product placement fixture flexible, can adapt to irregular products

2.Horizontal electrode design can meet the requirements of soft product processing.

3.Low energy and gas consumption products.

4.Convenient way to put up and down the board

5.Vacuum system integration, small footprint

6.Reasonable plasma reaction space, so that the treatment is more uniform

7.Integrated control system design makes operation more convenient

 

SPV-200 Vacuum plasma cleaning machine

ikndustry application:

1.Mobile phone industry: TP, middle frame, back cover surface cleaning activation

2.PCB/FPC industry: hole drilling and surface cleaning, Coverlay surface coarsening and cleaning

3.Semiconductor industry: semiconductor packaging, cameramodule, LED packaging, BGA packaging, 4.Wire Bond pretreatment

5.Ceramics: verpakking, pre-treatment of glue

6.Surface roughening etching: PI surface roughening, PPS etching, semiconductor silicon chip PN junction removal, ITO film etching

7.Plastic materials: Teflon surface activation, ABS surface activation, and other plastic material cleaning activation

8.Clean the surface before applying ITO

 

SPV-200 Vacuum plasma cleaning machine

Specification of equipment:

Power systemradio-frequency power supplymedium-frequency power supply
stroom0~1000W0~2000W
frequency13.56MHz40KHz
vacuum system· multi cell pump

 

Roots pump + single stage rotary vane pump
vacuum lineAll stainless steel piping, and high strength vacuum bellows
· Materiaal

 

Aluminum alloy (customizable stainless steel chamber)
thickness25mm
leakproofnessMilitary grade welding seal
Cavity internal dimensions600×600×600mm(W×H×D)
Effective size of electrode plate575×510mm(W×D)
Available space spacing34mm
Electrode plate layoutHorizontal layout, movable extraction
Work trayStandard set, material optional (aluminium, wire mesh)
work space8 laag
Gas systemflow range0~300SCCM
Process gas gas circuitStandard two channels, can be customized (argon, oxygen, nitrogen, hydrogen, carbon tetrafluoride)
controle systeemsystems controlPLC
delivery method7 inch touchscreen
· Other Parameter

boundary dimension1050×1750×1050mm(宽×高×深)
gewicht350KG
Device Appearance Colorsilver gray

 

 

Fabrieksspecificaties:

Fabrieksspecificaties
 

Specificatie wisselstroom

 

 

Stroomvoorziening:AC380V,50/60Hz,5draad,50EEN

 

Fabrieksuitlaat

 

Stroom:2.0 m³/min
 

Gas requirements for plant work

 

 

Stroom:1~10 L/min

Druk:3~7 kg/cm²

Pijp diameter:6×4 mm

Textuur:PU-buis

PurityMore than 99.99%

 

Fabrieksvereisten voor perslucht

 

 

Stroom:1~10 L/min

Druk:3~7 kg/cm²

Pijp diameter:8×5 mm

Textuur:PU-buis

Dew point:-40℃ under

Particle>0.3μm:10Pcs/ft³

 

 

2.3 General Requirements

General requirements
Risk identificationIdentificatie van gevaren onder hoge druk

 

 

Serviceomgevingtemperatuur-:15~30℃

vochtigheid:30~70%

Andere zaken die aandacht behoevenNiet-brandbare gassen, corrosieve gassen, explosions or reactive dust

Gas cylinders need to be fixed

 

 

Configuration list
Serial NumberNaamdescriptioneenheidquantity
1Main engineboundary dimension:1050×1750×1050mm

(width × height × depth)

 

Pc

1
2 

Love sincerely

 

Aluminum alloy vacuum chamber

 

inside dimension 450×450×500mm

(width × height × depth)

 

Pc

1
3Excitation power supply 

radio-frequency power supply

edium-frequency power supplySet1
 

frequency:13.56MHz

Kracht: 0~1000W

Equipped with automatic vacuum capacitor matching machine

 

frequency:40KHz;

0~2000W;

 

4PLCSiemensS7-200 

Pc

1
5 

Touch screen

Wei lun tong,7 inch screenMT6071iE 

Pc

1
6Flowmeter· British wawick brand,Argon,Oxygen

 

Pc2
7Vacuum pompRoots pump (BSJ70) -251 m3/h + single stage rotary vane pump (Laipo SV100B-100m3/h)Pc1
8 

Vacuum gauge

· INFICON

 

 

Pc

1
9SpecificatieVacuum plasma cleaning machine spv-200 operation manual 

Pc

1

 

 

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