SPV-100 Vacuum plasma cleaning machine

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SPV-100 Vacuum plasma cleaning machine

Overzicht:

Vacuum Plasma Cleaner(Plasma-reiniger),the gas is separated into plasma state through the excitation power supply, and the plasma ACTS on the product surface to clean the pollutants on the product surface, so as to improve the surface activity and enhance the adhesion.Plasma cleaning is a new, milieubescherming, efficient and stable surface treatment.

 

SPV-100 Vacuum plasma cleaning machine

P.roduct feature:

1.Product placement fixture flexible, can adapt to irregular products

2.Horizontal electrode design can meet the requirements of soft product processing.

3.Low energy and gas consumption products.

4.Convenient way to put up and down the board

5.Vacuum system integration, small footprint

6.Reasonable plasma reaction space, so that the treatment is more uniform

7.Integrated control system design makes operation more convenient

 

SPV-100 Vacuum plasma cleaning machine

ikndustry application:

1.Mobile phone industry: TP, middle frame, back cover surface cleaning activation

2.PCB/FPC industry: hole drilling and surface cleaning, Coverlay surface coarsening and cleaning

3.Semiconductor industry: semiconductor packaging, cameramodule, LED packaging, BGA packaging, 4.Wire Bond pretreatment

5.Ceramics: verpakking, pre-treatment of glue

6.Surface roughening etching: PI surface roughening, PPS etching, semiconductor silicon chip PN junction removal, ITO film etching

7.Plastic materials: Teflon surface activation, ABS surface activation, and other plastic material cleaning activation

8.Clean the surface before applying ITO

 

SPV-100 Vacuum plasma cleaning machine

Specification of equipment:

Power system 

radio-frequency power supply

medium-frequency power supply
stroom0~600W0~2000W
frequency13.56MHz40KHz
 

 

 

 

 

 

 

 

 

 

 

 

 

Vacuum plant

 

Double-stage vane pump (oil pump)

 

 

 

 

60m3/h

 

vacuum line

All stainless steel piping and high strength vacuum bellows
textureAluminum alloy (customizable stainless steel cavity)
thickness25mm
leakproofnessMilitary grade welding seal
Cavity internal dimensions4450×450×500mm

(width × height × depth)

 

Effective size of electrode plate

420×411mm(width × depth)
Available space spacing22.5mm
 

Electrode layout

 

 

 

Horizontal arrangement, activity extraction

 

 

Work trayStandard one set, material optional (aluminium, steel wire mesh)
 

work space

8 laag
Gas systemflow range0~300SCCM
Process gas pathStandard with two, can be customized
Controle systeemsystems controlPLC
delivery method7 inch touchscreen
Other parametersboundary dimension900×1750×1000mm(w×h×d)
gewicht200KG
Equipment appearance colorsilver gray

 

 

 

Fabrieksspecificaties:

Fabrieksspecificaties
 

Specificatie wisselstroom

 

 

Stroomvoorziening:AC380V,50/60Hz,5draad,50EEN

 

Fabrieksuitlaat

 

Stroom:2.0 m³/min
 

Gas requirements for plant work

 

 

Stroom:1~10 L/min

Druk:3~7 kg/cm²

Pijp diameter:6×4 mm

Textuur:PU-buis

PurityMore than 99.99%

 

Fabrieksvereisten voor perslucht

 

 

Stroom:1~10 L/min

Druk:3~7 kg/cm²

Pijp diameter:8×5 mm

Textuur:PUpipe

Dew point:-40℃ under

Particle>0.3μm:10Pcs/ft³

 

 

 

 

 

 

 

 

 

 

 

2.3 General Requirements

General requirements
Risk identificationIdentificatie van gevaren onder hoge druk

 

 

Serviceomgevingtemperatuur-:15~30℃

vochtigheid:30~70%

Andere zaken die aandacht behoevenNiet-brandbare gassen, corrosieve gassen, explosions or reactive dust

Gas cylinders need to be fixed

 

Configuration list
Serial NumberNaamdescriptioneenheidquantity
1Main engineboundary dimension:900×1750×1000mm

(width × height × depth)

Pc1
2 

Love sincerely

 

Aluminum alloy vacuum chamber

 

inside dimension 450×450×500mm

(width × height × depth)

 

Pc

1
3Excitation power supply 

radio-frequency power supply

edium-frequency power supplySet1
 

frequency:13.56MHz

Kracht 0 ~ 600 met wie

Or 0~1000W is optional;

Fully automatic vacuum capacitor matching unit

 

frequency:40KHz;

0~1000W;

 

4PLCSiemensS7-200 

Pc

1
5 

Touch screen

Wei lun tong,7 inch screenMT6071iE 

Pc

1
6FlowmeterBritish wawick brandPc2
7Vacuum pompFlyover double-stage vane pump (oil pump):60m3/h 

Pc

1
8 

Vacuum gauge

The fu kang 

Pc

1
9SpecificatieVacuum plasma cleaning machine spv-100 operation manual 

Pc

1

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