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SPV-100 Vacuum plasma cleaning machine
Overzicht:
Vacuum Plasma Cleaner(Plasma-reiniger),the gas is separated into plasma state through the excitation power supply, and the plasma ACTS on the product surface to clean the pollutants on the product surface, so as to improve the surface activity and enhance the adhesion.Plasma cleaning is a new, milieubescherming, efficient and stable surface treatment.
SPV-100 Vacuum plasma cleaning machine
P.roduct feature:
1.Product placement fixture flexible, can adapt to irregular products
2.Horizontal electrode design can meet the requirements of soft product processing.
3.Low energy and gas consumption products.
4.Convenient way to put up and down the board
5.Vacuum system integration, small footprint
6.Reasonable plasma reaction space, so that the treatment is more uniform
7.Integrated control system design makes operation more convenient
SPV-100 Vacuum plasma cleaning machine
ikndustry application:
1.Mobile phone industry: TP, middle frame, back cover surface cleaning activation
2.PCB/FPC industry: hole drilling and surface cleaning, Coverlay surface coarsening and cleaning
3.Semiconductor industry: semiconductor packaging, cameramodule, LED packaging, BGA packaging, 4.Wire Bond pretreatment
5.Ceramics: verpakking, pre-treatment of glue
6.Surface roughening etching: PI surface roughening, PPS etching, semiconductor silicon chip PN junction removal, ITO film etching
7.Plastic materials: Teflon surface activation, ABS surface activation, and other plastic material cleaning activation
8.Clean the surface before applying ITO
SPV-100 Vacuum plasma cleaning machine
Specification of equipment:
Power system | radio-frequency power supply | medium-frequency power supply | |
stroom | 0~600W | 0~2000W | |
frequency | 13.56MHz | 40KHz | |
Vacuum plant | Double-stage vane pump (oil pump)
|
60m3/h | |
vacuum line | All stainless steel piping and high strength vacuum bellows | ||
texture | Aluminum alloy (customizable stainless steel cavity) | ||
thickness | 25mm | ||
leakproofness | Military grade welding seal | ||
Cavity internal dimensions | 4450×450×500mm (width × height × depth) | ||
Effective size of electrode plate | 420×411mm(width × depth) | ||
Available space spacing | 22.5mm | ||
Electrode layout
| Horizontal arrangement, activity extraction
| ||
Work tray | Standard one set, material optional (aluminium, steel wire mesh) | ||
work space | 8 laag | ||
Gas system | flow range | 0~300SCCM | |
Process gas path | Standard with two, can be customized | ||
Controle systeem | systems control | PLC | |
delivery method | 7 inch touchscreen | ||
Other parameters | boundary dimension | 900×1750×1000mm(w×h×d) | |
gewicht | 200KG | ||
Equipment appearance color | silver gray |
Fabrieksspecificaties:
Fabrieksspecificaties | |
Specificatie wisselstroom
| Stroomvoorziening:AC380V,50/60Hz,5draad,50EEN |
Fabrieksuitlaat
| Stroom:2.0 m³/min |
Gas requirements for plant work
| Stroom:1~10 L/min Druk:3~7 kg/cm² Pijp diameter:6×4 mm Textuur:PU-buis Purity:More than 99.99% |
Fabrieksvereisten voor perslucht
| Stroom:1~10 L/min Druk:3~7 kg/cm² Pijp diameter:8×5 mm Textuur:PUpipe Dew point:-40℃ under Particle>0.3μm:10Pcs/ft³ |
2.3 General Requirements
General requirements | |
Risk identification | Identificatie van gevaren onder hoge druk
|
Serviceomgeving | temperatuur-:15~30℃ vochtigheid:30~70% |
Andere zaken die aandacht behoeven | Niet-brandbare gassen, corrosieve gassen, explosions or reactive dust Gas cylinders need to be fixed |
Configuration list | |||||
Serial Number | Naam | description | eenheid | quantity | |
1 | Main engine | boundary dimension:900×1750×1000mm (width × height × depth) | Pc | 1 | |
2 | Love sincerely | Aluminum alloy vacuum chamber
inside dimension 450×450×500mm (width × height × depth) | Pc | 1 | |
3 | Excitation power supply | radio-frequency power supply | edium-frequency power supply | Set | 1 |
frequency:13.56MHz; Kracht 0 ~ 600 met wie Or 0~1000W is optional; Fully automatic vacuum capacitor matching unit | frequency:40KHz; 0~1000W;
| ||||
4 | PLC | Siemens,S7-200 | Pc | 1 | |
5 | Touch screen | Wei lun tong,7 inch screen,MT6071iE | Pc | 1 | |
6 | Flowmeter | British wawick brand | Pc | 2 | |
7 | Vacuum pomp | Flyover double-stage vane pump (oil pump):60m3/h | Pc | 1 | |
8 | Vacuum gauge | The fu kang | Pc | 1 | |
9 | Specificatie | Vacuum plasma cleaning machine spv-100 operation manual | Pc | 1 |