- Açıklama
- soruşturma
SPV-60 Vacuum plasma cleaning machine
Outline:
Vacuum Plasma Cleaner(Plasma cleaner),the gas is separated into plasma state through the excitation power supply, and the plasma ACTS on the product surface to clean the pollutants on the product surface, so as to improve the surface activity and enhance the adhesion.Plasma cleaning is a new, çevresel koruma, efficient and stable surface treatment.
SPV-60 Vacuum plasma cleaning machine
Product feature:
1.Product placement fixture flexible, can adapt to irregular products
2.Horizontal electrode design can meet the requirements of soft product processing.
3.Low energy and gas consumption products.
4.Convenient way to put up and down the board
5.Vacuum system integration, small footprint
6.Reasonable plasma reaction space, so that the treatment is more uniform
7.Integrated control system design makes operation more convenient
SPV-60 Vacuum plasma cleaning machine
benndustry application:
1.Mobile phone industry: TP, middle frame, back cover surface cleaning activation
2.PCB/FPC industry: hole drilling and surface cleaning, Coverlay surface coarsening and cleaning
3.Semiconductor industry: semiconductor packaging, camera module, LED packaging, BGA packaging, 4.Wire Bond pretreatment
5.WeChat resmi_1: packaging, pre-treatment of glue
6.Surface roughening etching: PI surface roughening, PPS etching, semiconductor silicon chip PN junction removal, ITO film etching
7.Plastic materials: Teflon surface activation, ABS surface activation, and other plastic material cleaning activation
8.Clean the surface before applying ITO
SPV-60 Vacuum plasma cleaning machine
Technical specifications
Power System
| Radio-frequency power supply | Medium-frequency power supply | |
Güç | 0~600W | 0~1000W | |
Sıklık | 13.56MHz | 40KHz | |
Vacuum system
| Two-stage rotary vane pump (oil pump) | 40m3/h | |
Vacuum line | All stainless steel piping, and high strength vacuum bellows | ||
Malzeme | Aluminum alloy (customizable stainless steel chamber) | ||
Kalınlık | 25mm | ||
Leakproofness | Military grade welding seal | ||
Internal dimension of cavity | 375×375×430mm(W×H×D) | ||
Effective size of electrode plate | 345×344mm(W×D) | ||
Available space spacing | 22.5mm | ||
Electrode plate layout | Horizontal layout, movable extraction | ||
Work tray | Standard set, material optional (alüminyum, wire mesh) | ||
Work space | 6 layers | ||
Gas system
| Flow range | 0~300SCCM | |
Process gas gas circuit | Standard with two channels, can be customized | ||
Kontrol sistemi | System control | PLC | |
Delivery method | 7 inç dokunmatik ekran | ||
Other Parameter
| Sınır boyutu | 900×1600×900mm(宽×高×深) | |
Ağırlık | 150KİLOGRAM | ||
Device appearance color | silver gray |
Factory specification requirements
Factory specification requirements | |
Ac power specifications | Güç kaynağı:AC380V,50/60Hz.,5 lines,50Bir |
Factory exhaust | Flow:2.0 m³/min |
Gas requirements for factory work | Flow:1~10 L/min Basınç:3~7 kg/cm² Pipe diameter:6×4 mm Malzeme: PU pipe Purity: above 99.99% |
Factory compressed air requirements | Flow:1~10 L/min Basınç:3~7 kg/cm² Pipe diameter:8×5 mm Malzeme: PU pipe Dew point: below -40℃ Particle>0.3μm:10Pcs/ft³ |
Configuration list
configuration list | |||||
Hayır | İsim | Açıklama | Birim | Miktar | |
1 | Ev sahibi | Sınır boyutu:900×1600×900mm(W×H×D) | Pc | 1 | |
2 | Vacuum chamber | Aluminum alloy vacuum chamber Inside dimension375×375×430mm(W×H×D) | Pc | 1 | |
3 | Excitation power supply | Radio-frequency power supply | Medium-frequency power supply | Set | 1 |
Sıklık:13.56MHz; Güç :0~600W Automatic vacuum capacitor matcher | Sıklık:40KHz; 0~1000W;
| ||||
4 | PLC | SIEMENS,S7-200 | Pc | 1 | |
5 | Touch screen | Vellon, 7 inch screen, MT6071iE | Pc | 1 | |
6 | Flowmeter | British Wawick brand | Pc | 2 | |
7 | Vakum pompası | Flyover two-stage rotary vane pump (oil pump) : 40m3/h | Pc | 1 | |
8 | Vacuum gauge | INFICON
| Pc | 1 | |
9 | Manuel
| Operation manual of vacuum plasma cleaner SPV-60 | Pc | 1 |
Optional table
Optional table | ||
Excitation power supply | Radio-frequency power supply | Medium-frequency power supply |
Custom power: sıklık:13.56MHz; Güç:0~1000W; Custom automatic vacuum capacitor matching machine | Sıklık:40KHz,güç:2000W
| |
CERES power supply: frequency 13.56MHz; Güç:0~600W or 0~1000W Optional ; American CERES automatic vacuum capacitor matcher | ||
Vakum pompası | Germany Leibao double-stage rotary vane pump (oil pump):40m3/h | |
Flyover two-stage rotary vane pump (oil pump) :40m3/h |