SPV-150 Vacuum plasma cleaning machine

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SPV-150 Vacuum plasma cleaning machine

Outline:

Vacuum Plasma Cleaner(Plasma cleaner),the gas is separated into plasma state through the excitation power supply, and the plasma ACTS on the product surface to clean the pollutants on the product surface, so as to improve the surface activity and enhance the adhesion.Plasma cleaning is a new, çevresel koruma, efficient and stable surface treatment.

SPV-150 Vacuum plasma cleaning machine

Product feature:

1.Product placement fixture flexible, can adapt to irregular products

2.Horizontal electrode design can meet the requirements of soft product processing.

3.Low energy and gas consumption products.

4.Convenient way to put up and down the board

5.Vacuum system integration, small footprint

6.Reasonable plasma reaction space, so that the treatment is more uniform

7.Integrated control system design makes operation more convenient

benndustry application:

1.Mobile phone industry: TP, middle frame, back cover surface cleaning activation

2.PCB/FPC industry: hole drilling and surface cleaning, Coverlay surface coarsening and cleaning

3.Semiconductor industry: semiconductor packaging, camera module, LED packaging, BGA packaging, 4.Wire Bond pretreatment

5.WeChat resmi_1: packaging, pre-treatment of glue

6.Surface roughening etching: PI surface roughening, PPS etching, semiconductor silicon chip PN junction removal, ITO film etching

7.Plastic materials: Teflon surface activation, ABS surface activation, and other plastic material cleaning activation

8.Clean the surface before applying ITO

SPV-150 Vacuum plasma cleaning machine

Specification of equipment:

Power system		radio-frequency power supply	medium-frequency power supply
	güç	0~600W	0~1000W or 0-2000W
	sıklık	13.56MHz	40KHz
Vacuum plant	Double-stage vane pump (oil pump)	Double stage rotary vane pump (oil pump) or Roots pump + single stage rotary vane pump
	vacuum line	All stainless steel piping and high strength vacuum bellows
	texture	Aluminum alloy (customizable stainless steel cavity)
	thickness	25mm
	leakproofness	Military grade welding seal
	Cavity internal dimensions	500×500×670mm (width × height × depth)
	Effective size of electrode plate	587×470mm(width × depth)
	Available space spacing	34mm
	Electrode layout	Horizontal arrangement, activity extraction
	Work tray	Standard one set, material optional (alüminyum, steel wire mesh)
	work space	8 layer
Gas system	flow range	0~300SCCM
	Process gas path	Standard with two, can be customized
Kontrol sistemi	systems control	PLC
	delivery method	7 inç dokunmatik ekran
Other parameters	boundary dimension	1020×1720×1120mm（w×h×d）
	ağırlık	350KİLOGRAM
	Equipment appearance color	silver gray

Factory specifications:

Factory specifications

Ac power specification

Güç kaynağı：AC380V，50/60Hz.，5wire，50Bir

Factory exhaust

Flow：2.0 m³/min

Gas requirements for plant work

Flow：1~10 L/min

Basınç：3~7 kg/cm²

Pipe diameter：8×5mm

Texture：PU pipe

Saflık：More than 99.99%

Factory compressed air requirements

Flow：1~10 L/min

Basınç：3~7 kg/cm²

Pipe diameter：8×5 mm

Texture：PUpipe

Dew point：-40℃ under

Particle＞0.3μm：10Pcs/ft³

2.3 General requirements

Genel Gereksinimler
Risk identification	High pressure hazard identification
Service environment	sıcaklık：15~30℃ nem：30~70%
Other matters needing attention	No combustible gases, corrosive gases, explosions or reactive dust Gas cylinders need to be fixed

Configuration list
Serial Number	İsim	description		birim	quantity
1	Main engine	boundary dimension：1020×1720×1120mm (width × height × depth)		Pc	1
2	Love sincerely	Aluminum alloy vacuum chamber inside dimension 500×500×675mm (width × height × depth)		Pc	1
3	Excitation power supply	radio-frequency power supply	edium-frequency power supply	Set	1
3	Excitation power supply	sıklık：13.56MHz； Güç 0 ~ 600 w Or 0~1000W is optional; Fully automatic vacuum capacitor matching unit	sıklık：40KHz； 0~1000W or 0-2000w	Set	1
4	PLC	Siemens，S7-200		Pc	1
5	Touch screen	Wei lun tong，7 inch screen，MT6071iE		Pc	1
6	Flowmeter	British wawick brand		Pc	2
7	Vakum pompası	Flyover double-stage vane pump (oil pump)：60m3/h		Pc	1
8	Vacuum gauge	The fu kang		Pc	1
9	Şartname	Vacuum plasma cleaning machine spv-150 operation manual		Pc	1