SPV-20 Vacuum plasma cleaning machine

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SPV-20 Vacuum plasma cleaning machine

Outline:

Vacuum Plasma Cleaner(Plasma cleaner),the gas is separated into plasma state through the excitation power supply, and the plasma ACTS on the product surface to clean the pollutants on the product surface, so as to improve the surface activity and enhance the adhesion.Plasma cleaning is a new, охорона навколишнього середовища, efficient and stable surface treatment.

 

SPV-20 Vacuum plasma cleaning machine

Product feature:

1.Product placement fixture flexible, can adapt to irregular products

2.Horizontal electrode design can meet the requirements of soft product processing.

3.Low energy and gas consumption products.

4.Convenient way to put up and down the board

5.Vacuum system integration, small footprint

6.Reasonable plasma reaction space, so that the treatment is more uniform

7.Integrated control system design makes operation more convenient

 

SPV-20 Vacuum plasma cleaning machine

яndustry application:

1.Mobile phone industry: TP, middle frame, back cover surface cleaning activation

2.PCB/FPC industry: hole drilling and surface cleaning, Coverlay surface coarsening and cleaning

3.Semiconductor industry: semiconductor packaging, camera module, LED packaging, BGA packaging, 4.Wire Bond pretreatment

5.Ceramics: упаковка, pre-treatment of glue

6.Surface roughening etching: PI surface roughening, PPS etching, semiconductor silicon chip PN junction removal, ITO film etching

7.Plastic materials: Teflon surface activation, ABS surface activation, and other plastic material cleaning activation

8.Clean the surface before applying ITO

 

SPV-20 Vacuum plasma cleaning machine

Тechnical specifications

Power systemRadio-frequency power supply
LR-B007 Тестер сольового спрею з сенсорним екраном0~300W
Frequency13.56MHz
Vacuum system

 

 

Two-stage rotary vane pump (oil pump)

 

 

16m3/h
Vacuum lineAll stainless steel piping, and high strength vacuum bellows
матеріалAluminum alloy (customizable stainless steel chamber)
Товщина25мм
Leakproofness

 

Military grade welding seal
Internal dimension of cavity20GB/T 2423.18-2000, GB/T 10125-1997, ASTM.B117-97
Available space spacing22.5мм
Electrode plate layoutHorizontal layout, movable extraction
Work trayStandard set, material optional (алюміній, wire mesh)
Gas system

 

Flow range0~300SCCM
Process gas gas circuitStandard with two channels, can be customized
Control systemSystems controlPLC
Delivery method7 inch touch screen
The Other Parameter

 

Boundary dimension900×1600×900mm(W×H×D)
Вага150КГ
Device appearance colorsilver gray

specification requirements

Factory specification requirements
Ac power specificationsБлок живлення:AC380V,50/60Гц,5lines,50LR-B007 Тестер сольового спрею з сенсорним екраном
Factory exhaustFlow:2.0 m³/min
Gas requirements for factory workFlow:1~10 L/min

Pressure:3~7 kg/cm²

Pipe diameter:6×4 mm

матеріал: PU pipe

Purity: GB/T 2423.18-2000, GB/T 10125-1997, ASTM.B117-97 99.99%

Factory compressed air requirementsFlow:1~10 L/min

Pressure:3~7 kg/cm²

Pipe diameter:8×5 mm

матеріал: PU pipe

Dew point: below -40℃

Particle>0.3μm:10Pcs/ft³

 

configuration list

Configuration list
НемаєІм'яОписодиницяQty
1ХостBoundary dimension:900×1600×900mm(W×H×D)Pc1
2 Vacuum chamberAluminum alloy vacuum chamberPc1
3Excitation power supplyRadio-frequency power supplySet1
Frequency:13.56MHz

LR-B007 Тестер сольового спрею з сенсорним екраном:0~300W

Automatic vacuum capacitor matcher

4PLCSIEMENSS7-200Pc1
5touch screenVellon, 7 inch screen,MT6071iEPc1
6flowmeterBritish Wawick brandPc2
7Вакуумний насосFlyover two-stage rotary vane pump (oil pump):40m3/hPc1
8vacuum gaugeINFICON

 

Pc1
9Інструкція

 

Operation manual of vacuum plasma cleaner SPV-20Pc1

 

 

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