SPV-20 Vacuum plasma cleaning machine

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SPV-20 Vacuum plasma cleaning machine

โครงร่าง:

Vacuum Plasma Cleaner(เครื่องล้างพลาสมา),the gas is separated into plasma state through the excitation power supply, and the plasma ACTS on the product surface to clean the pollutants on the product surface, so as to improve the surface activity and enhance the adhesion.Plasma cleaning is a new, การคุ้มครองสิ่งแวดล้อม, efficient and stable surface treatment.

 

SPV-20 Vacuum plasma cleaning machine

roduct feature:

1.Product placement fixture flexible, can adapt to irregular products

2.Horizontal electrode design can meet the requirements of soft product processing.

3.Low energy and gas consumption products.

4.Convenient way to put up and down the board

5.Vacuum system integration, small footprint

6.Reasonable plasma reaction space, so that the treatment is more uniform

7.Integrated control system design makes operation more convenient

 

SPV-20 Vacuum plasma cleaning machine

ผมndustry application:

1.Mobile phone industry: TP, middle frame, back cover surface cleaning activation

2.PCB/FPC industry: hole drilling and surface cleaning, Coverlay surface coarsening and cleaning

3.Semiconductor industry: semiconductor packaging, โมดูลกล้อง, LED packaging, BGA packaging, 4.Wire Bond pretreatment

5.เซรามิกส์: บรรจุภัณฑ์, pre-treatment of glue

6.Surface roughening etching: PI surface roughening, PPS etching, semiconductor silicon chip PN junction removal, ITO film etching

7.Plastic materials: Teflon surface activation, ABS surface activation, and other plastic material cleaning activation

8.Clean the surface before applying ITO

 

SPV-20 Vacuum plasma cleaning machine

ทีechnical specifications

Power systemRadio-frequency power supply
อำนาจ0~300W
Frequency13.56MHz
Vacuum system

 

 

Two-stage rotary vane pump (oil pump)

 

 

16m3/h
Vacuum lineAll stainless steel piping, and high strength vacuum bellows
วัสดุAluminum alloy (customizable stainless steel chamber)
ความหนา25มม
Leakproofness

 

Military grade welding seal
Internal dimension of cavity20ล
Available space spacing22.5มม
Electrode plate layoutHorizontal layout, movable extraction
Work trayStandard set, material optional (อลูมิเนียม, wire mesh)
Gas system

 

Flow range0~300SCCM
Process gas gas circuitStandard with two channels, can be customized
ระบบควบคุมSystems controlPLC
Delivery method7 inch touch screen
The Other Parameter

 

Boundary dimension900×1600×900mm(W×H×D)
น้ำหนัก150กิโลกรัม
Device appearance colorsilver gray

specification requirements

Factory specification requirements
Ac power specificationsแหล่งจ่ายไฟ:AC380V,50/60เฮิร์ตซ์,5เส้น,50ก
ท่อไอเสียโรงงานไหล:2.0 m³/min
Gas requirements for factory workไหล:1~10 L/min

ความดัน:3~7 kg/cm²

เส้นผ่านศูนย์กลางท่อ:6×4 mm

วัสดุ: ท่อพียู

Purity: ข้างบน 99.99%

Factory compressed air requirementsไหล:1~10 L/min

ความดัน:3~7 kg/cm²

เส้นผ่านศูนย์กลางท่อ:8×5 มม

วัสดุ: ท่อพียู

จุดน้ำค้าง: ต่ำกว่า -40 ℃

Particle>0.3μm:10Pcs/ft³

 

configuration list

รายการการกำหนดค่า
ไม่ชื่อคำอธิบายหน่วยจำนวน
1เจ้าภาพBoundary dimension:900×1600×900mm(W×H×D)Pc1
2 Vacuum chamberAluminum alloy vacuum chamberPc1
3Excitation power supplyRadio-frequency power supplyชุด1
Frequency:13.56MHz

อำนาจ:0~300W

Automatic vacuum capacitor matcher

4PLCSIEMENSS7-200Pc1
5touch screenVellon, 7 inch screen,MT6071iEPc1
6flowmeterBritish Wawick brandPc2
7ปั๊มสุญญากาศFlyover two-stage rotary vane pump (oil pump):40m3/hPc1
8vacuum gaugeINFICON

 

Pc1
9คู่มือ

 

Operation manual of vacuum plasma cleaner SPV-20Pc1

 

 

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