- คำอธิบาย
- สอบถาม
SPV-20 Vacuum plasma cleaning machine
โครงร่าง:
Vacuum Plasma Cleaner(เครื่องล้างพลาสมา),the gas is separated into plasma state through the excitation power supply, and the plasma ACTS on the product surface to clean the pollutants on the product surface, so as to improve the surface activity and enhance the adhesion.Plasma cleaning is a new, การคุ้มครองสิ่งแวดล้อม, efficient and stable surface treatment.
SPV-20 Vacuum plasma cleaning machine
ปroduct feature:
1.Product placement fixture flexible, can adapt to irregular products
2.Horizontal electrode design can meet the requirements of soft product processing.
3.Low energy and gas consumption products.
4.Convenient way to put up and down the board
5.Vacuum system integration, small footprint
6.Reasonable plasma reaction space, so that the treatment is more uniform
7.Integrated control system design makes operation more convenient
SPV-20 Vacuum plasma cleaning machine
ผมndustry application:
1.Mobile phone industry: TP, middle frame, back cover surface cleaning activation
2.PCB/FPC industry: hole drilling and surface cleaning, Coverlay surface coarsening and cleaning
3.Semiconductor industry: semiconductor packaging, โมดูลกล้อง, LED packaging, BGA packaging, 4.Wire Bond pretreatment
5.เซรามิกส์: บรรจุภัณฑ์, pre-treatment of glue
6.Surface roughening etching: PI surface roughening, PPS etching, semiconductor silicon chip PN junction removal, ITO film etching
7.Plastic materials: Teflon surface activation, ABS surface activation, and other plastic material cleaning activation
8.Clean the surface before applying ITO
SPV-20 Vacuum plasma cleaning machine
ทีechnical specifications
Power system | Radio-frequency power supply | |
อำนาจ | 0~300W | |
Frequency | 13.56MHz | |
Vacuum system
| Two-stage rotary vane pump (oil pump)
| 16m3/h |
Vacuum line | All stainless steel piping, and high strength vacuum bellows | |
วัสดุ | Aluminum alloy (customizable stainless steel chamber) | |
ความหนา | 25มม | |
Leakproofness
| Military grade welding seal | |
Internal dimension of cavity | 20ล | |
Available space spacing | 22.5มม | |
Electrode plate layout | Horizontal layout, movable extraction | |
Work tray | Standard set, material optional (อลูมิเนียม, wire mesh) | |
Gas system
| Flow range | 0~300SCCM |
Process gas gas circuit | Standard with two channels, can be customized | |
ระบบควบคุม | Systems control | PLC |
Delivery method | 7 inch touch screen | |
The Other Parameter
| Boundary dimension | 900×1600×900mm(W×H×D) |
น้ำหนัก | 150กิโลกรัม | |
Device appearance color | silver gray |
specification requirements
Factory specification requirements | |
Ac power specifications | แหล่งจ่ายไฟ:AC380V,50/60เฮิร์ตซ์,5เส้น,50ก |
ท่อไอเสียโรงงาน | ไหล:2.0 m³/min |
Gas requirements for factory work | ไหล:1~10 L/min ความดัน:3~7 kg/cm² เส้นผ่านศูนย์กลางท่อ:6×4 mm วัสดุ: ท่อพียู Purity: ข้างบน 99.99% |
Factory compressed air requirements | ไหล:1~10 L/min ความดัน:3~7 kg/cm² เส้นผ่านศูนย์กลางท่อ:8×5 มม วัสดุ: ท่อพียู จุดน้ำค้าง: ต่ำกว่า -40 ℃ Particle>0.3μm:10Pcs/ft³ |
configuration list
รายการการกำหนดค่า | ||||
ไม่ | ชื่อ | คำอธิบาย | หน่วย | จำนวน |
1 | เจ้าภาพ | Boundary dimension:900×1600×900mm(W×H×D) | Pc | 1 |
2 | Vacuum chamber | Aluminum alloy vacuum chamber | Pc | 1 |
3 | Excitation power supply | Radio-frequency power supply | ชุด | 1 |
Frequency:13.56MHz; อำนาจ:0~300W Automatic vacuum capacitor matcher | ||||
4 | PLC | SIEMENS,S7-200 | Pc | 1 |
5 | touch screen | Vellon, 7 inch screen,MT6071iE | Pc | 1 |
6 | flowmeter | British Wawick brand | Pc | 2 |
7 | ปั๊มสุญญากาศ | Flyover two-stage rotary vane pump (oil pump):40m3/h | Pc | 1 |
8 | vacuum gauge | INFICON
| Pc | 1 |
9 | คู่มือ
| Operation manual of vacuum plasma cleaner SPV-20 | Pc | 1 |