SPV-60 Vacuum plasma cleaning machine

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SPV-60 Vacuum plasma cleaning machine

Outline:

Vacuum Plasma Cleaner(Plasma cleaner),the gas is separated into plasma state through the excitation power supply, and the plasma ACTS on the product surface to clean the pollutants on the product surface, so as to improve the surface activity and enhance the adhesion.Plasma cleaning is a new, заштита животне средине, efficient and stable surface treatment.

SPV-60 Vacuum plasma cleaning machine

Пroduct feature:

1.Product placement fixture flexible, can adapt to irregular products

2.Horizontal electrode design can meet the requirements of soft product processing.

3.Low energy and gas consumption products.

4.Convenient way to put up and down the board

5.Vacuum system integration, small footprint

6.Reasonable plasma reaction space, so that the treatment is more uniform

7.Integrated control system design makes operation more convenient

 

SPV-60 Vacuum plasma cleaning machine

Иndustry application:

1.Mobile phone industry: TP, middle frame, back cover surface cleaning activation

2.PCB/FPC industry: hole drilling and surface cleaning, Coverlay surface coarsening and cleaning

3.Semiconductor industry: semiconductor packaging, camera module, LED packaging, BGA packaging, 4.Wire Bond pretreatment

5.Ceramics: packaging, pre-treatment of glue

6.Surface roughening etching: PI surface roughening, PPS etching, semiconductor silicon chip PN junction removal, ITO film etching

7.Plastic materials: Teflon surface activation, ABS surface activation, and other plastic material cleaning activation

8.Clean the surface before applying ITO

 

SPV-60 Vacuum plasma cleaning machine

Тechnical specifications

 

Power System

 

Radio-frequency power supplyMedium-frequency power supply
Снага0~600W0~1000W
Frequency13.56MHz40KHz
Vacuum system

 

Two-stage rotary vane pump (oil pump)40m3/h
Vacuum lineAll stainless steel piping, and high strength vacuum bellows
MaterialAluminum alloy (customizable stainless steel chamber)
Дебљина25мм
LeakproofnessMilitary grade welding seal
Internal dimension of cavity375×375×430mm(W×H×D)
Effective size of electrode plate345×344mm(W×D)
Available space spacing22.5мм
Electrode plate layoutHorizontal layout, movable extraction
Work trayStandard set, material optional (алуминијум, wire mesh)
Work space6 layers
Gas system

 

Flow range0~300SCCM
Process gas gas circuitStandard with two channels, can be customized
Control systemSystem controlPLC
Delivery method7 inch touch screen
Other Parameter

 

Гранична димензија900×1600×900mm(宽×高×深)
Тежина150КГ
Device appearance colorsilver gray


Factory specification requirements

Factory specification requirements
Ac power specificationsНапајање:AC380V,50/60Хз,5 lines,50А.
Factory exhaustFlow:2.0 m³/min
Gas requirements for factory workFlow:1~10 L/min

Pressure:3~7 kg/cm²

Pipe diameter:6×4 mm

Material: PU pipe

Purity: above 99.99%

Factory compressed air requirementsFlow:1~10 L/min

Pressure:3~7 kg/cm²

Pipe diameter:8×5 mm

Material: PU pipe

Dew point: below -40℃

Particle>0.3μm:10Pcs/ft³


Ц.onfiguration list

configuration list
НеИмеОписЈединицаКол
1HostГранична димензија:900×1600×900mm(W×H×D)Pc1
2 Vacuum chamberAluminum alloy vacuum chamber

Inside dimension375×375×430mm(W×H×D)

Pc1
3Excitation power supplyRadio-frequency power supplyMedium-frequency power supplySet1
Frequency:13.56MHz

Снага :0~600W

Automatic vacuum capacitor matcher

Frequency:40KHz

0~1000W;

 

4PLCSIEMENSS7-200Pc1
5Touch screenVellon, 7 inch screen, MT6071iEPc1
6FlowmeterBritish Wawick brandPc2
7Vacuum pumpFlyover two-stage rotary vane pump (oil pump) : 40m3/hPc1
8Vacuum gaugeINFICON

 

Pc1
9Manual

 

Operation manual of vacuum plasma cleaner SPV-60Pc1

 

Optional table

Optional table
Excitation power supplyRadio-frequency power supplyMedium-frequency power supply
Custom power: фреквенција:13.56MHz

Снага:0~1000W

Custom automatic vacuum capacitor matching machine

Frequency:40KHzpower:2000В

 

CERES power supply: frequency 13.56MHz

Снага:0~600W or 0~1000W Optional

American CERES automatic vacuum capacitor matcher

Vacuum pumpGermany Leibao double-stage rotary vane pump (oil pump):40m3/h
Flyover two-stage rotary vane pump (oil pump) :40m3/h

 

 

 

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