SPV-200 Vacuum plasma cleaning machine

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SPV-200 Vacuum plasma cleaning machine

Outline:

Vacuum Plasma Cleaner(Plasma cleaner),the gas is separated into plasma state through the excitation power supply, and the plasma ACTS on the product surface to clean the pollutants on the product surface, so as to improve the surface activity and enhance the adhesion.Plasma cleaning is a new, заштита животне средине, efficient and stable surface treatment.

 

SPV-200 Vacuum plasma cleaning machine

Пroduct feature:

1.Product placement fixture flexible, can adapt to irregular products

2.Horizontal electrode design can meet the requirements of soft product processing.

3.Low energy and gas consumption products.

4.Convenient way to put up and down the board

5.Vacuum system integration, small footprint

6.Reasonable plasma reaction space, so that the treatment is more uniform

7.Integrated control system design makes operation more convenient

 

SPV-200 Vacuum plasma cleaning machine

Иndustry application:

1.Mobile phone industry: TP, middle frame, back cover surface cleaning activation

2.PCB/FPC industry: hole drilling and surface cleaning, Coverlay surface coarsening and cleaning

3.Semiconductor industry: semiconductor packaging, camera module, LED packaging, BGA packaging, 4.Wire Bond pretreatment

5.Ceramics: packaging, pre-treatment of glue

6.Surface roughening etching: PI surface roughening, PPS etching, semiconductor silicon chip PN junction removal, ITO film etching

7.Plastic materials: Teflon surface activation, ABS surface activation, and other plastic material cleaning activation

8.Clean the surface before applying ITO

 

SPV-200 Vacuum plasma cleaning machine

Сpecification of equipment:

Power systemradio-frequency power supplymedium-frequency power supply
power0~1000W0~2000W
фреквенција13.56MHz40KHz
vacuum system· multi cell pump

 

Roots pump + single stage rotary vane pump
vacuum lineAll stainless steel piping, and high strength vacuum bellows
· Material

 

Aluminum alloy (customizable stainless steel chamber)
thickness25мм
leakproofnessMilitary grade welding seal
Cavity internal dimensions600×600×600mm(W×H×D)
Effective size of electrode plate575×510mm(W×D)
Available space spacing34мм
Electrode plate layoutHorizontal layout, movable extraction
Work trayStandard set, material optional (алуминијум, wire mesh)
work space8 layer
Gas systemflow range0~300SCCM
Process gas gas circuitStandard two channels, can be customized (argon, oxygen, nitrogen, hydrogen, carbon tetrafluoride)
control systemsystems controlPLC
delivery method7 inch touch screen
· Other Parameter

гранична димензија1050×1750×1050mm(宽×高×深)
тежина350КГ
Device Appearance Colorsilver gray

 

 

Factory specifications:

Factory specifications
 

Ac power specification

 

 

Напајање:AC380V,50/60Хз,5wire,50А.

 

Factory exhaust

 

Flow:2.0 m³/min
 

Gas requirements for plant work

 

 

Flow:1~10 L/min

Pressure:3~7 kg/cm²

Pipe diameter:6×4 mm

TexturePU pipe

PurityMore than 99.99%

 

Factory compressed air requirements

 

 

Flow:1~10 L/min

Pressure:3~7 kg/cm²

Pipe diameter:8×5 mm

TexturePU pipe

Dew point:-40℃ under

Particle>0.3μm:10Pcs/ft³

 

 

2.3 Г.eneral Requirements

General requirements
Risk identificationHigh pressure hazard identification

 

 

Service environmentтемпература:15~30℃

влажност:30~70%

Other matters needing attentionNo combustible gases, corrosive gases, explosions or reactive dust

Gas cylinders need to be fixed

 

 

Configuration list
Serial NumberИмеdescriptionјединицаquantity
1Main engineгранична димензија:1050×1750×1050mm

(width × height × depth)

 

Pc

1
2 

Love sincerely

 

Aluminum alloy vacuum chamber

 

inside dimension 450×450×500mm

(width × height × depth)

 

Pc

1
3Excitation power supply 

radio-frequency power supply

edium-frequency power supplySet1
 

фреквенција:13.56MHz

Снага: 0~1000W

Equipped with automatic vacuum capacitor matching machine

 

фреквенција:40KHz

0~2000W;

 

4PLCSiemensS7-200 

Pc

1
5 

Touch screen

Wei lun tong,7 inch screenMT6071iE 

Pc

1
6Flowmeter· British wawick brand,Аргон,Oxygen

 

Pc2
7Vacuum pumpRoots pump (BSJ70) -251 m3/h + single stage rotary vane pump (Laipo SV100B-100m3/h)Pc1
8 

Vacuum gauge

· INFICON

 

 

Pc

1
9СпецификацијаVacuum plasma cleaning machine spv-200 operation manual 

Pc

1

 

 

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