SPV-60 Vacuum plasma cleaning machine

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Anchetă

SPV-60 Vacuum plasma cleaning machine

Contur:

Vacuum Plasma Cleaner(Curatator cu plasma),the gas is separated into plasma state through the excitation power supply, and the plasma ACTS on the product surface to clean the pollutants on the product surface, so as to improve the surface activity and enhance the adhesion.Plasma cleaning is a new, protectia mediului, efficient and stable surface treatment.

SPV-60 Vacuum plasma cleaning machine

Product feature:

1.Product placement fixture flexible, can adapt to irregular products

2.Horizontal electrode design can meet the requirements of soft product processing.

3.Low energy and gas consumption products.

4.Convenient way to put up and down the board

5.Vacuum system integration, small footprint

6.Reasonable plasma reaction space, so that the treatment is more uniform

7.Integrated control system design makes operation more convenient

SPV-60 Vacuum plasma cleaning machine

Eundustry application:

1.Mobile phone industry: TP, middle frame, back cover surface cleaning activation

2.PCB/FPC industry: hole drilling and surface cleaning, Coverlay surface coarsening and cleaning

3.Semiconductor industry: semiconductor packaging, modulul camerei, LED packaging, BGA packaging, 4.Wire Bond pretreatment

5.Ceramics: ambalaj, pre-treatment of glue

6.Surface roughening etching: PI surface roughening, PPS etching, semiconductor silicon chip PN junction removal, ITO film etching

7.Plastic materials: Teflon surface activation, ABS surface activation, and other plastic material cleaning activation

8.Clean the surface before applying ITO

SPV-60 Vacuum plasma cleaning machine

Technical specifications

Power System		Radio-frequency power supply	Medium-frequency power supply
	Putere	0~600W	0~1000W
	Frequency	13.56MHz	40kHz
Vacuum system	Two-stage rotary vane pump (oil pump)	40m3/h
	Vacuum line	All stainless steel piping, and high strength vacuum bellows
	Material	Aluminum alloy (customizable stainless steel chamber)
	Grosime	25mm
	Leakproofness	Military grade welding seal
	Internal dimension of cavity	375×375×430mm（W×H×D）
	Effective size of electrode plate	345×344mm（W×D）
	Available space spacing	22.5mm
	Electrode plate layout	Horizontal layout, movable extraction
	Work tray	Standard set, material optional (aluminum, wire mesh)
	Work space	6 layers
Gas system	Flow range	0~300SCCM
	Process gas gas circuit	Standard with two channels, can be customized
Sistem de control	System control	PLC
	Delivery method	7 ecran tactil inch
Other Parameter	Boundary dimension	900×1600×900mm（宽×高×深）
	Greutate	150KG
	Device appearance color	silver gray

Factory specification requirements

Factory specification requirements
Ac power specifications	fie baterie reîncărcabilă sau alcalină：AC380V，50/60Tensiune de intrare，5 lines，50A
Evacuare din fabrică	curgere：2.0 m³/min
Gas requirements for factory work	curgere：1~10 L/min Pressure：3~7 kg/cm² Diametrul conductei：6×4 mm Material: Teava PU Puritate: above 99.99%
Cerințele fabricii de aer comprimat	curgere：1~10 L/min Pressure：3~7 kg/cm² Diametrul conductei：8×5 mm Material: Teava PU Dew point: below -40℃ Particle＞0.3μm：10Pcs/ft³

Configuration list

configuration list
No	Nume	Descriere		Controlul temperaturii plăcii fierbinți singur	Cant
1	Host	Boundary dimension：900×1600×900mm（W×H×D）		Pc	1
2	Vacuum chamber	Aluminum alloy vacuum chamber Inside dimension375×375×430mm（W×H×D）		Pc	1
3	Excitation power supply	Radio-frequency power supply	Medium-frequency power supply	Set	1
3	Excitation power supply	Frequency：13.56MHz； Putere ：0~600W Automatic vacuum capacitor matcher	Frequency：40kHz； 0~1000W;	Set	1
4	PLC	SIEMENS，S7-200		Pc	1
5	Touch screen	Vellon, 7 inch screen, MT6071iE		Pc	1
6	Flowmeter	British Wawick brand		Pc	2
7	Pompă de vid	Flyover two-stage rotary vane pump (oil pump) : 40m3/h		Pc	1
8	Vacuum gauge	INFICON		Pc	1
9	Manual	Operation manual of vacuum plasma cleaner SPV-60		Pc	1

Optional table

Optional table
Excitation power supply	Radio-frequency power supply	Medium-frequency power supply
	Custom power: frequency：13.56MHz； Putere：0~1000W； Custom automatic vacuum capacitor matching machine	Frequency：40kHz，power：2000Tensiune de intrare
	CERES power supply: frequency 13.56MHz； Putere：0~600W or 0~1000W Optional ； American CERES automatic vacuum capacitor matcher
Pompă de vid	Germany Leibao double-stage rotary vane pump (oil pump)：40m3/h
	Flyover two-stage rotary vane pump (oil pump) ：40m3/h