SPV-100 Vacuum plasma cleaning machine

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SPV-100 Vacuum plasma cleaning machine

Contur:

Vacuum Plasma Cleaner(Curatator cu plasma),the gas is separated into plasma state through the excitation power supply, and the plasma ACTS on the product surface to clean the pollutants on the product surface, so as to improve the surface activity and enhance the adhesion.Plasma cleaning is a new, protectia mediului, efficient and stable surface treatment.

 

SPV-100 Vacuum plasma cleaning machine

Product feature:

1.Product placement fixture flexible, can adapt to irregular products

2.Horizontal electrode design can meet the requirements of soft product processing.

3.Low energy and gas consumption products.

4.Convenient way to put up and down the board

5.Vacuum system integration, small footprint

6.Reasonable plasma reaction space, so that the treatment is more uniform

7.Integrated control system design makes operation more convenient

 

SPV-100 Vacuum plasma cleaning machine

Eundustry application:

1.Mobile phone industry: TP, middle frame, back cover surface cleaning activation

2.PCB/FPC industry: hole drilling and surface cleaning, Coverlay surface coarsening and cleaning

3.Semiconductor industry: semiconductor packaging, modulul camerei, LED packaging, BGA packaging, 4.Wire Bond pretreatment

5.Ceramics: ambalaj, pre-treatment of glue

6.Surface roughening etching: PI surface roughening, PPS etching, semiconductor silicon chip PN junction removal, ITO film etching

7.Plastic materials: Teflon surface activation, ABS surface activation, and other plastic material cleaning activation

8.Clean the surface before applying ITO

 

SPV-100 Vacuum plasma cleaning machine

Specification of equipment:

Power system 

radio-frequency power supply

medium-frequency power supply
power0~600W0~2000W
frequency13.56MHz40kHz
 

 

 

 

 

 

 

 

 

 

 

 

 

Vacuum plant

 

Double-stage vane pump (oil pump)

 

 

 

 

60m3/h

 

vacuum line

All stainless steel piping and high strength vacuum bellows
texturăAluminum alloy (customizable stainless steel cavity)
grosime25mm
leakproofnessMilitary grade welding seal
Cavity internal dimensions4450×450×500mm

(width × height × depth)

 

Effective size of electrode plate

420×411mm(width × depth)
Available space spacing22.5mm
 

Electrode layout

 

 

 

Horizontal arrangement, activity extraction

 

 

Work trayStandard one set, material optional (aluminum, steel wire mesh)
 

work space

8 layer
Gas systemflow range0~300SCCM
Process gas pathStandard with two, can be customized
Sistem de controlsystems controlPLC
delivery method7 ecran tactil inch
Other parametersboundary dimension900×1750×1000mm(w×h×d)
greutate200KG
Equipment appearance colorsilver gray

 

 

 

Specificațiile fabricii:

Specificațiile fabricii
 

Specificații de alimentare ca

 

 

fie baterie reîncărcabilă sau alcalină:AC380V,50/60Tensiune de intrare,5sârmă,50A

 

Evacuare din fabrică

 

curgere:2.0 m³/min
 

Gas requirements for plant work

 

 

curgere:1~10 L/min

Pressure:3~7 kg/cm²

Diametrul conductei:6×4 mm

Textură:Teava PU

Puritate:More than 99.99%

 

Cerințele fabricii de aer comprimat

 

 

curgere:1~10 L/min

Pressure:3~7 kg/cm²

Diametrul conductei:8×5 mm

Textură:PUpipe

Dew point:-40℃ under

Particle>0.3μm:10Pcs/ft³

 

 

 

 

 

 

 

 

 

 

 

2.3 Gîn general Requirements

General requirements
Risk identificationIdentificarea pericolelor de înaltă presiune

 

 

Service environmenttemperatura:15~30℃

umiditate:30~70%

Other matters needing attentionNo combustible gases, corrosive gases, explosions or reactive dust

Gas cylinders need to be fixed

 

Configuration list
Serial NumberNumedescriptionunitatecantitate
1Main engineboundary dimension:900×1750×1000mm

(width × height × depth)

Pc1
2 

Love sincerely

 

Aluminum alloy vacuum chamber

 

inside dimension 450×450×500mm

(width × height × depth)

 

Pc

1
3Excitation power supply 

radio-frequency power supply

edium-frequency power supplySet1
 

frequency:13.56MHz

Putere 0 ~ 600 w

Or 0~1000W is optional;

Fully automatic vacuum capacitor matching unit

 

frequency:40kHz;

0~1000W;

 

4PLCSiemensS7-200 

Pc

1
5 

Touch screen

Wei lun tong,7 inch screenMT6071iE 

Pc

1
6FlowmeterBritish wawick brandPc2
7Pompă de vidFlyover double-stage vane pump (oil pump):60m3/h 

Pc

1
8 

Vacuum gauge

The fu kang 

Pc

1
9SpecificațieVacuum plasma cleaning machine spv-100 operation manual 

Pc

1

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